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- 1Azmayesh-Fard, Seyed M.
- 1Bezuidenhout, Louis Wentzel
- 1Brausen, Henry A
- 1Fang, Guoping
- 1Gallagher, Else E
- 1Gharib, Hossam M.H.
- 3Moussa, Walied (Mechanical Engineering)
- 1Amirfazli, Alidad (Department of Mechanical Engineering, York University)
- 1Backhouse, Chris (Department of Electrical and Computer Engineering, University of Waterloo)
- 1Backhouse, Christopher (Electrical and Computer Engineering)
- 1Brett, Michael J. (Electrical and Computer Engineering)
- 1Daneshmand, Mojgan (Electrical and Computer Engineering)
Energy harvesting is an important developing field in Microelectromechanical Systems (MEMS) research. In this thesis, a fixed-fixed folded spring-based harvester is presented as an alternative mechanical element for beam-based piezoelectric harvesters to reduce its natural frequency for low...
We present a platform for research into nanomaterial-enhanced gas sensing using magnetomotive MEMS resonators. A microfabrication process fl ow is developed and carried out to create metallized silicon MEMS resonators. In tandem, a test system based around a balanced electronic bridge is...
An Investigation of Using n-Si Piezoresistive Behavior to Develop a Three-Dimensional Stress Sensing RosetteDownload
This work involves the design, microfabrication, calibration, and testing of a new silicon-based piezoresistive rosette capable of extracting the three-dimensional (3D) stresses in the silicon upon deformation. A new 10-element piezoresistive rosette was devised to extract all stress components...
Design and Microfabrication of Robust and Highly Integrated Thermal Lab-On-A-Chip Polymeric Systems for Genetic DiagnosisDownload
The lab-on-chip (LOC) technology could transform and greatly enhance the health care system by making genetic diagnosis tests fast, accurate and readily accessible. However, most LOC systems are not prepared to resist variations of their external environment, as they depend upon many...
Lab-on-chip systems will be a major component in the future of health care. These technologies enable point-of-care testing by miniaturizing and improving the efficiency of many diagnostic techniques. Possible applications include the detection of various pathogens using genetic amplification...
Development of MEMS-based Piezoresistive Three Dimensional Stress/Strain Sensor with Temperature CompensationDownload
In this research, a developed n-type piezoresistive three dimensional (3D) stress sensor with full temperature compensation is presented. The proposed sensing rosette benefits from the stress insensitivity of the full-circular n-type piezoresistor, oriented over (111) silicon plane, to detect...
Capacitive micromachined ultrasound transducers (CMUTs) are a promising replacement technology for piezoelectric composite transducers, as they offer a more flexible architecture, wider signal bandwidth, and improved impedance matching between the sensor and the sensing medium. While CMUTs have...
Miniaturization of spectrometers for microfluidic applications is currently an intense area of research. This thesis is devoted to the design, fabrication, and testing of a planar optical microspectrometer. Optical microspectrometers are potentially important candidates for noninvasive detection...
Large-Scale Multi-Frequency Capacitive Micromachined Ultrasonic Transducer (CMUT) Arrays for Ultrasound Medical Imaging and Therapeutic ApplicationsDownload
Ultrasonic transducers capable of operating over multiple frequency bands could have several interesting medical applications including multi-resolution multi-depth imaging for point-of-care ultrasound, imaging-therapy, super-harmonic contrast agent imaging, super-resolution imaging, image-guided...
Carbon/molecule/Cu/Au molecular junctions were fabricated on 4-inch silicon wafers using microfabrication techniques common in commercial semiconductor manufacturing. Electron-beam deposited carbon films are introduced as substrates, and the junctions exhibited high yield and excellent...