A Platform for Nanomaterial-Enhanced Gas Sensing using Magnetomotive MEMS

• Author / Creator

  Brausen, Henry A

• We present a platform for research into nanomaterial-enhanced gas sensing using magnetomotive MEMS resonators. A microfabrication process fl ow is developed and carried out to create metallized silicon MEMS resonators. In tandem, a test system based around a balanced electronic bridge is constructed to perform full electrical characterization of our devices, both in atmosphere, and at vacuum. An innovative fine-tuning circuit allows this apparatus to be built at low-cost. Initial results, compared with predictions from modelling, reveal that our system works as intended, but further optimization of our devices is required to achieve the best possible performance.

• Subjects / Keywords

  • Balanced Measurement
  • Instrumentation
  • Nanomaterials
  • Microfabrication
  • MEMS
  • NEMS
  • Sensors
  • Resonators
  • Gas Sensing
  • Magnetomotive

• Graduation date

  Fall 2017

• Type of Item

  Thesis

• Degree

  Master of Science

• DOI

  https://doi.org/10.7939/R3862BR62

• License

  This thesis is made available by the University of Alberta Libraries with permission of the copyright owner solely for non-commercial purposes. This thesis, or any portion thereof, may not otherwise be copied or reproduced without the written consent of the copyright owner, except to the extent permitted by Canadian copyright law.