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Skip to Search Results- 1Brausen, Henry A
- 1Compton, Shawn R
- 1Fraser, Alastair
- 1Janzen, Alexander Ryan
- 1Kan, Meng
- 1Kim, Paul H.
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Fall 2017
We present a platform for research into nanomaterial-enhanced gas sensing using magnetomotive MEMS resonators. A microfabrication process fl ow is developed and carried out to create metallized silicon MEMS resonators. In tandem, a test system based around a balanced electronic bridge is...
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Fall 2011
High aspect ratio microelectromechanical structures have been found, in the literature, to collapse due to capillary forces of liquids. In this dissertation, mathematical models are developed to study (i) the collapse of a microstructure represented by a double cantilevered beam (DCB) with a free...
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Fall 2011
This work investigates the use of nanoimprint lithography for creating nanoscale resonator devices for applications in mass sensing. A bilayer resist consisting of PMMA 495/LOR 3A allowed the ideal imprint yield for resonators with widths ranging from 300 nm down to 120 nm. Resonators with...
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Spring 2010
The procedure for milling micrometre scale cantilevers of lutetium iron garnet using a focused ion beam microscope was developed. The infrastructure to study these cantilevers using rotational hysteresis loops and ferromagnetic resonance experiments was set up. The cantilevers were shown to...
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In quest of improved nanomechanical sensitivity at larger damping and applications in ambient conditions
DownloadFall 2019
In the current state-of-the-art, a wide variety of devices, from computer clocks to smartphone accelerometers and from pressure gauges to atomic force microscope sensors, rely on mechanical resonators, either in microscale or nanoscale. Nanoscale mechanical resonators have even more potential...
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Metallic thin films for NEMS/MEMS: from fundamental behaviour to microstructural design and fabrication
DownloadFall 2011
The main focus of this thesis is the study of thin metal films in microelectromechanical/nanoelectromechanical systems (MEMS/NEMS), ranging from application to fundamental behaviour. The use of metallic structural components is desirable since they are electrically conductive, optically reflective...
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Fall 2016
Mass sensitive mechanical resonator based biosensors are a promising label free biological sensing platform due to the capability for high sensitivity, fast response, accurate and real time measurement, integration with traditional electronics and flexible readout techniques. With the advancement...
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Nanofabrication Methods Towards a Photonically-Based Torque Magnetometer for Measurement of Individual Single-Crystalline Yttrium-Iron-Garnet Microstructures
DownloadSpring 2012
This thesis describes preparation and nanofabrication of single crystalline yttrium-iron-garnet (YIG) for the purposes of ultra-clean torque magnetometry, as well as the design, fabrication, and testing of photonic crystal-based nanoelectromechanical systems for sensing applications. A focused...
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Fall 2014
Torsional oscillators are well known for their extensive applications ranging from measuring gravity to detecting angular momentum of light. When these torsional resonators scale down, through advanced nanofabrication techniques, the applications extend to measuring quantum effects such as the...
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Fall 2010
The scanning tunneling microscope (STM) based on quantum tunneling can attain atomic-scale spatial resolution and help elucidate a wealth of phenomena in the microscopic world. However a limitation in scanning tunneling microscopy is the low temporal resolution due to readout circuit frequency...