Capillary Collapse and Adhesion of a Micro Double Cantilever Beam

  • Author / Creator
    Lavoie, Shawn
  • High aspect ratio microelectromechanical structures have been found, in the literature, to collapse due to capillary forces of liquids. In this dissertation, mathematical models are developed to study (i) the collapse of a microstructure represented by a double cantilevered beam (DCB) with a free end liquid droplet, and (ii) post-collapse DCB adhesion. Formulations are presented using the classical Bernoulli-Euler beam theory as well as an analysis that accounts for geometrical nonlinearity. The models introduce rigorous coupling between the DCB deformation, the capillary forces and meniscus position, and have predicted interesting nonlinear behaviours that previous models could not. Parameters governing the capillary collapse and adhesion of the DCB are identified and their influence is discussed. A single dimensionless number that controls the condition for collapse is proposed. Comparison between the linear and nonlinear beam analyses shows that linear analysis generally suffices in description of capillary collapse and adhesion of microelectromechanical systems.

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  • Type of Item
  • Degree
    Master of Science
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