This decommissioned ERA site remains active temporarily to support our final migration steps to https://ualberta.scholaris.ca, ERA's new home. All new collections and items, including Spring 2025 theses, are at that site. For assistance, please contact erahelp@ualberta.ca.
Search
Skip to Search Results-
Fall 2017
We present a platform for research into nanomaterial-enhanced gas sensing using magnetomotive MEMS resonators. A microfabrication process fl ow is developed and carried out to create metallized silicon MEMS resonators. In tandem, a test system based around a balanced electronic bridge is...
-
Effects of In-Situ Temperature Control on the Nanostructure of Glancing Angle Deposition Thin Films
DownloadFall 2013
Glancing angle deposition (GLAD) is a thin film deposition technique that utilizes oblique vapour incidence and substrate rotation to grow various nanocolumn structures. The growth of these structures is heavily influenced by the substrate temperature during deposition. Therefore, in-situ...
-
Spring 2013
Sensor technologies profoundly impact all aspects of our everyday lives. Advances have led to smaller devices, faster response times, reduced costs, higher specificity and sensitivity, and even new sensing technologies. Surface acoustic wave (SAW) technology, which has been around for many...
-
Fall 2024
Reducing device size in sensing technology allows for greater measurable responses, and easier integration into smaller testing environments. This work details the fabrication of high sensitivity magnetomotive gravimetric MEMS cantilevers for eventual use in gas detection. The devices are doubly...
-
Fundamentals of Film Growth by Glancing Angle Deposition for Inorganic and Inorganic/Liquid Crystal Hybrid Optical Systems
DownloadFall 2011
This thesis investigates two facets of thin film growth via glancing angle deposition. The first half of the work focuses on the fundamentals of film growth with a focus on uniformity and optical design. This portion of the thesis addresses important engineering questions that are relevant to...
-
High Surface Area Nanoelectromechanical Systems via the Integration of Glancing Angle Deposition Thin Films
DownloadFall 2013
High surface area nanoelectromechanical systems (NEMS) are fabricated using glancing angle deposition (GLAD) thin films as the high surface area layer. The GLAD films are deposited on already-released NEMS cantilevers and doubly clamped beams (DCBs) with good uniformity. The resonance frequencies...