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- 1Brausen, Henry A
- 1Compton, Shawn R
- 1Fraser, Alastair
- 1Janzen, Alexander Ryan
- 1Kim, Paul H.
- 1Lavoie, Shawn
We present a platform for research into nanomaterial-enhanced gas sensing using magnetomotive MEMS resonators. A microfabrication process fl ow is developed and carried out to create metallized silicon MEMS resonators. In tandem, a test system based around a balanced electronic bridge is...
High aspect ratio microelectromechanical structures have been found, in the literature, to collapse due to capillary forces of liquids. In this dissertation, mathematical models are developed to study (i) the collapse of a microstructure represented by a double cantilevered beam (DCB) with a free...
This work investigates the use of nanoimprint lithography for creating nanoscale resonator devices for applications in mass sensing. A bilayer resist consisting of PMMA 495/LOR 3A allowed the ideal imprint yield for resonators with widths ranging from 300 nm down to 120 nm. Resonators with...
The procedure for milling micrometre scale cantilevers of lutetium iron garnet using a focused ion beam microscope was developed. The infrastructure to study these cantilevers using rotational hysteresis loops and ferromagnetic resonance experiments was set up. The cantilevers were shown to...
Metallic thin films for NEMS/MEMS: from fundamental behaviour to microstructural design and fabricationDownload
The main focus of this thesis is the study of thin metal ﬁlms in microelectromechanical/nanoelectromechanical systems (MEMS/NEMS), ranging from application to fundamental behaviour. The use of metallic structural components is desirable since they are electrically conductive, optically reﬂective...
Nanofabrication Methods Towards a Photonically-Based Torque Magnetometer for Measurement of Individual Single-Crystalline Yttrium-Iron-Garnet MicrostructuresDownload
This thesis describes preparation and nanofabrication of single crystalline yttrium-iron-garnet (YIG) for the purposes of ultra-clean torque magnetometry, as well as the design, fabrication, and testing of photonic crystal-based nanoelectromechanical systems for sensing applications. A focused...
Torsional oscillators are well known for their extensive applications ranging from measuring gravity to detecting angular momentum of light. When these torsional resonators scale down, through advanced nanofabrication techniques, the applications extend to measuring quantum effects such as the...