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We present a platform for research into nanomaterial-enhanced gas sensing using magnetomotive MEMS resonators. A microfabrication process fl ow is developed and carried out to create metallized silicon MEMS resonators. In tandem, a test system based around a balanced electronic bridge is...
This work investigates the use of nanoimprint lithography for creating nanoscale resonator devices for applications in mass sensing. A bilayer resist consisting of PMMA 495/LOR 3A allowed the ideal imprint yield for resonators with widths ranging from 300 nm down to 120 nm. Resonators with...
Nanomechanical resonators offer a pathway towards highly sensitive and label-free detection of biomolecules by transducing the mass of bound analytes into resonant frequency shifts. Zeptogram level and even single cell detections have been successfully achieved by others. However, these...
A capillary-type fluorescent-core microcavity refractive index sensor based on whispering gallery mode (WGM) resonances is presented. The device consists of a glass microcapillary with a thin layer of fluorescent silicon quantum dots (QDs) coated on the channel surface. The high index of the QD...
Nanomechanical resonators are explored as mass sensors and molecular sensors due to their high sensitivity and real time label-free detection ability, respectively. One downside of mechanical molecular sensing is the lack of chemical information carried in the signal. For this reason, a...