Search
Skip to Search Results- 15Nanofabrication
- 4Nanomechanics
- 3Plasmonics
- 2Electron Beam Lithography
- 2Nanophotonics
- 1 Integrated Optics
- 1Adeyenuwo, Adegboyega P.
- 1Ahmed, Haseeb
- 1Bachman, Jocelyn
- 1Bu, Lintong
- 1Compton, Shawn R
- 1Du, Rongbing
-
Spring 2012
The chemical mechanical polishing of Copper (Cu-CMP) is a complex and poorly understood process. Despite this, it is widely used throughout the semiconductor and microelectronics industries, and makes up a significant portion of wafer processing costs. In these contexts, desirable polishing...
-
Design and Fabrication of Fractal Photoconductive Terahertz Emitters and Antenna Coupled Tunnel Diode Terahertz Detectors
DownloadFall 2012
Improved terahertz (THz) photoconductive antennas that are able to both emit higher THz radiation power and detect lower THz radiation signal levels than the traditional THz photoconductive antennas are presented. Also, different classes of fractals are investigated to realize whether the...
-
Spring 2023
Plasmonic nanostructures have received increasing attention due to their unique ability to mediate the conversion of light into different forms of energy. This opens pathways for numerous applications from ultrasensitive surface-enhanced Raman scattering (SERS) materials characterization to...
-
Fabrication and testing of surface-enhanced Raman spectroscopy substrates for the detection of biomolecules
DownloadSpring 2014
Biosensing involves the detection of analytes using biological elements as receptor agents for the specific binding of molecules to a surface. Surface-enhanced Raman spectroscopy (SERS), a surface-sensitive vibrational spectroscopy technique used to amplify Raman signals, provides unique...
-
Spring 2010
New methods to fabricate nanometer sized structures will be a major driving force in transforming nanoscience to nanotechnology. There are numerous examples of the incorporation of nanoscale structures or materials enhancing the functionality of a device. Graphitic carbon is a widely used...
-
Spring 2012
Electron Beam Lithography (EBL) is a powerful tool for structuring materials at the deep nanoscale. Modeling and simulation of electron-beam interactions at this length scale is vital to understanding and optimizing nanofabrication using EBL. The low to high voltage (5 keV – 100 keV) regimes of...
-
High Surface Area Nanoelectromechanical Systems via the Integration of Glancing Angle Deposition Thin Films
DownloadFall 2013
High surface area nanoelectromechanical systems (NEMS) are fabricated using glancing angle deposition (GLAD) thin films as the high surface area layer. The GLAD films are deposited on already-released NEMS cantilevers and doubly clamped beams (DCBs) with good uniformity. The resonance frequencies...
-
Spring 2019
Coupling optical cavities to freely moving mechanical devices results in optomechanical systems. Enabled by advancing fabrication techniques, optomechanical systems are now easily fabricated using silicon-on-insulator chips at the micro- and nanoscale. These nano-optomechanical systems (NOMS)...
-
Fall 2013
Electron beam lithography (EBL) is the leading technology for versatile two dimensional patterning at the deep (10-100 nm) nanoscale. In addition to its reputation as an enabling technology for next generation advances in industry, its ease of use, accuracy, and cost has made it the technology of...
-
Nanofabrication Methods Towards a Photonically-Based Torque Magnetometer for Measurement of Individual Single-Crystalline Yttrium-Iron-Garnet Microstructures
DownloadSpring 2012
This thesis describes preparation and nanofabrication of single crystalline yttrium-iron-garnet (YIG) for the purposes of ultra-clean torque magnetometry, as well as the design, fabrication, and testing of photonic crystal-based nanoelectromechanical systems for sensing applications. A focused...