Search
Skip to Search Results-
Metallic thin films for NEMS/MEMS: from fundamental behaviour to microstructural design and fabrication
DownloadFall 2011
The main focus of this thesis is the study of thin metal films in microelectromechanical/nanoelectromechanical systems (MEMS/NEMS), ranging from application to fundamental behaviour. The use of metallic structural components is desirable since they are electrically conductive, optically reflective...
-
Fall 2013
This thesis outlines the development of two platforms for integrating microfabricated sensors with high pressure feedthroughs for application in hostile high temperature high pressure environments. An application in oil well production logging is explored and two sensors were implemented with...
-
Fall 2020
This thesis describes the theory, fabrication, and characterization of on-chip, integrated Fabry-Perot microcavities embedded with thin silicon nitride membranes. The approach combines a previously developed process for fabricating self-assembled Si / SiO2 / Ta2O5 curved mirror cavities, with a...
-
Spring 2018
As common human computer interfaces(HCIs), touchscreen panels (TSPs) have been ubiquitously adopted in our daily life especially in the consuming electronics, and numerous industrial applications. However, force information has been a missing part in conventional TSPs, drawing limitations in the...
-
Fall 2009
Resonant microcantilevers are promising transducers for bacteria detection because of their high sensitivities. Surface stress and mass from adsorbates affect the resonant frequency. We developed a novel method for decoupling the frequency contributions of a change in mass and surface stress on a...
-
Fall 2010
The scanning tunneling microscope (STM) based on quantum tunneling can attain atomic-scale spatial resolution and help elucidate a wealth of phenomena in the microscopic world. However a limitation in scanning tunneling microscopy is the low temporal resolution due to readout circuit frequency...
-
Theoretical and Experimental Investigation on the Use of Surface Acoustic Wave Sensors for Evaluating the Adhesion of SU-8 Thin Films
DownloadFall 2015
This research investigates the use of a SU-8/AlN/Si SAW sensor for evaluating the adhesion of SU-8 thin films. A theoretical model is developed to plot the wave dispersion profile for the SU-8/AlN/Si configuration. A spring interface model is utilized to represent the SU-8/AlN interface using a...
-
Top-Orthogonal-to-Bottom-Electrode Capacitive Micromachined Ultrasound Transducers for Low-Cost 3D Ultrasound Imaging
DownloadFall 2013
Capacitive micromachined ultrasound transducers (CMUTs) offer a promising solution for three-dimensional ultrasound imaging due to their ability to be easily fabricated in two-dimensional arrays. However, channel routing is still non-trivial and cost-intensive. The subject of this thesis is a...
-
Utilization of Semiconductors Piezoresistive Properties in Mechanical Strain Measurements under Varying Temperature Conditions for Structural Health Monitoring Applications
DownloadSpring 2013
Strain gauges have been powerful tools in experimental stress analysis. This importance is expected to continue, even though other means of strain measurement are continually introduced to the market. The strain gauge is a simple device that can be easily installed to measure mechanical strain....