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Monolithically Integrated Membrane-In-The-Middle Cavity Optomechanical Systems
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- Author / Creator
- Hornig, Graham J
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This thesis describes the theory, fabrication, and characterization of on-chip, integrated Fabry-Perot microcavities embedded with thin silicon nitride membranes. The approach combines a previously developed process for fabricating self-assembled Si / SiO2 / Ta2O5 curved mirror cavities, with a XeF2-based sacrificial etch process to allow for free standing PECVD silicon nitride membranes to be released internally. Membranes with a fundamental mechanical resonant frequency ~ 10 MHz were coupled to wavelength-scale cavities operating in the ~ 1550 nm wavelength range, and the optical and mechanical properties of the combined system were studied. The estimated optomechanical coupling coefficient g0 / 2 pi ~ 0.1 MHz is significantly higher than that previously reported in membrane-in-the-middle systems. In further contrast to previous approaches, the work here presents a scalable and monolithic surface-micromachining process for systems that are otherwise typically large and complex. These devices are also described within the context of existing cavity optomechanics literature. The small size and high areal chip density of these devices may allow them to serve as potential candidates in a variety of applications such as sensing, frequency transduction, and quantum information.
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- Graduation date
- Fall 2020
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- Type of Item
- Thesis
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- Degree
- Master of Science
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- License
- Permission is hereby granted to the University of Alberta Libraries to reproduce single copies of this thesis and to lend or sell such copies for private, scholarly or scientific research purposes only. Where the thesis is converted to, or otherwise made available in digital form, the University of Alberta will advise potential users of the thesis of these terms. The author reserves all other publication and other rights in association with the copyright in the thesis and, except as herein before provided, neither the thesis nor any substantial portion thereof may be printed or otherwise reproduced in any material form whatsoever without the author's prior written permission.