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- 1Boron doped polysilicon
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Atomic Layer Deposition of Metal Oxides for the Preparation of High Performance Zn-Air Battery Electrodes
DownloadSpring 2020
As the world continues to implement renewable energy technologies such as wind and solar, comes the demand for grid scale energy storage. Zn-air batteries (ZABs) are a promising candidate for grid scale energy storage because of their high energy density, low cost, high safety, and low...
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Spring 2011
In thin film fabrication, growth of high quality thin films with reproducibile properties is one of the main challenges. In order to achieve this goal, the influnce of the deposition system control parameters on film properties must be studied. This can be a complex process since many...
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Fall 2021
Growing demand for electrical energy calls for more efficient electronic devices not only in terms of performance but also in terms of energy-efficient fabrication processes. With traditional semiconductors (such as silicon) reaching their limits in electrical power handling, alternative...
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Spring 2014
Static and dynamic characterization was performed on a prototype piezoresistive silicon MEMS strain sensor. Static tests showed the MEMS sensor’s gauge factor ranged from 10-13, which is higher than a foil gauge’s gauge factor. Power measurements at -20 C, 24 C, and 80 C showed that the average...
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Study of the High Rate Chemical Mechanical Polishing of Heavily Boron-doped Polysilicon for 3D Applications
DownloadFall 2014
The chemical mechanical polishing of polysilicon is a complex process and is not well understood. Despite this, it is used in the semiconductor industry for applications such as via filling and 3D packaging. Although the doping of polysilicon enables applying a wide range of conductivities,...