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- 1Air-core optical cavities
- 1Buckling
- 1Buckling self-assembly
- 1Fabry-Perot micro-cavity
- 1Integrated Optics, Microcavity
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Air-core microcavities and metal-dielectric filters - building blocks for optofluidic microsystems
DownloadFall 2012
This thesis describes a study on two optical devices intended to be building blocks for the creation of integrated optical/microfluidic lab-on-a-chip systems. First, arrays of curved-mirror dome-shaped microcavities were fabricated by buckling self-assembly of a-Si/SiO2 multilayers. This novel...
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Integrated Hollow-Core Microcavity Arrays - Building Blocks for Optical Sensing and Quantum Information
DownloadFall 2017
This thesis describes an experimental and theoretical study of a novel class of air-core microcavities on chips, monolithically fabricated by the controlled formation of delamination buckles within a-Si/SiO2-based multilayer thin film stacks. First, arrays of dome-shaped microcavities were...
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Fall 2010
This thesis describes the fabrication and characterization of integrated hollow Bragg waveguides fabricated by controlled thin film buckling. Hollow waveguides based on two different set of materials were studied. In the first case, thermal tuning of air-core dimensions was studied using...
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Fall 2020
This thesis describes the theory, fabrication, and characterization of on-chip, integrated Fabry-Perot microcavities embedded with thin silicon nitride membranes. The approach combines a previously developed process for fabricating self-assembled Si / SiO2 / Ta2O5 curved mirror cavities, with a...
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Fall 2020
This thesis describes the design, fabrication, morphological overview, optical characterization, and fluid infiltration of ‘open-access’, small mode-volume, and high quality-factor Fabry-Perot micro-cavities in the telecommunication range followed by the simulation of a-Si:H/SiO2-based Bragg...