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Towards a monolithic process for open-access Fabry-Perot etalon cavities
- Author / Creator
- Maldaner, James B
This thesis describes the design, fabrication, morphological overview, optical
characterization, and fluid infiltration of ‘open-access’, small mode-volume,
and high quality-factor Fabry-Perot micro-cavities in the telecommunication
range followed by the simulation of a-Si:H/SiO2-based Bragg mirrors for submicron range devices.
First, we describe a monolithic approach to fabricating large-scale arrays
of high-finesse and low-mode-volume Fabry-Perot microcavities with open access to the air-core. A stress-driven buckling self-assembly technique was used
to form half-symmetric curved-mirror cavities, and a dry etching process was
subsequently used to create micro-pores through the upper mirror. We show
that the cavities retain excellent optical properties, with reflectance-limited
finesse ∼2000 and highly predictable Laguerre-Gaussian modes. We furthermore demonstrate the ability to introduce liquids into the cavity region by
micro-injection through the pores.
Secondly, we conducted a theoretical study on the potential use of amorphous hydrogenated silicon (a-Si:H) as the high-index material in quarterwave-stack Bragg mirrors for cavity QED applications. Compared to conventionally employed Ta2O5, a-Si:H provides a much higher index contrast with
SiO2, thus promising significantly reduced layer-number requirements and a
smaller mode volume. Silicon-based mirrors offer the additional advantage of
providing a wide omnidirectional reflection band, which allows greater control
of the background electromagnetic modes. From numerical studies at 850 nm,
iiwe show that a-Si:H-based mirrors could enable significant improvements with
respect to a Fabry-Perot cavity’s maximum Purcell factor, cooperativity, and
spontaneous emission coupling factor, and in addition, potentially reduced
fabrication complexity. These advantages are anticipated to be even more
compelling at longer wavelengths. Applications in sensing, optofluidics, and
cavity quantum electrodynamics are envisioned.
- Graduation date
- Fall 2020
- Type of Item
- Master of Science
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