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Nanoscale resonators fabricated from metallic alloys, and modeling and simulation of polycrystalline thin film growth Open Access


Other title
metallic glass
film growth
thin film
Type of item
Degree grantor
University of Alberta
Author or creator
Ophus, Colin L
Supervisor and department
Mitlin, David (Chemical and Materials Engineering)
Examining committee member and department
Ken Cadien (Chemical and Materials Engineering)
John Nychka (Chemical and Materials Engineering)
Michael Eikerling (Physics, Simon Fraser University)
Michael Brett (Electrical and Computer Engineering)
Hao Zhang (Chemical and Materials Engineering)
Department of Chemical and Materials Engineering

Date accepted
Graduation date
Doctor of Philosophy
Degree level
Part I - We have designed a binary metallic alloy for nanoscale resonator applications. We used magnetron sputtering to deposit films with different stoichiometries of aluminum and molybdenum and then characterized the microstructure and physical properties of each film. A structure zone map is proposed to describe the dependence of surface and bulk structure on composition. We then fabricated proof of principle resonators from the Al-32 at%Mo composition, selected for its optimized physical properties. An optical interferometer was used to characterize the frequency response of our resonators. Part II - We investigate the growth of faceted polycrystalline thin films with modeling and simulations. A new analytic model is derived for the case of orientation dependent facet growth velocity and the dependence of growth on initial grain orientations is explicitly calculated. Level set simulations were used to both confirm this analytic model and extend it to include various angular flux distributions, corresponding to different deposition methods. From these simulations, the effects of self-shadowing on polycrystalline film growth are quantitatively evaluated.
Permission is hereby granted to the University of Alberta Libraries to reproduce single copies of this thesis and to lend or sell such copies for private, scholarly or scientific research purposes only. Where the thesis is converted to, or otherwise made available in digital form, the University of Alberta will advise potential users of the thesis of these terms. The author reserves all other publication and other rights in association with the copyright in the thesis and, except as herein before provided, neither the thesis nor any substantial portion thereof may be printed or otherwise reproduced in any material form whatsoever without the author's prior written permission.
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