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Skip to Search Results- 3Atomic Layer Deposition
- 1ALD
- 1ALD Process Optimization
- 1Catalyst
- 1Chemical mechanical polishing
- 1Colloidal stability
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A study of the colloidal stability of mixed abrasive slurries of silica and ceria nanoparticles for chemical mechanical polishing
DownloadFall 2011
Slurry stability is an important factor in Chemical Mechanical Polishing (CMP) efficiency. However, few studies have been done in this respect. In settling tests at pH 4, adding various amounts of ceria to colloidal silica slurries was shown to change the stability of the resulted mixed abrasive...
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Fall 2012
Atomic layer deposition (ALD) is a powerful ultra-thin film deposition technique that uses sequential self-limiting surface reactions to provide conformal atomic scale film growth. Deposition of ALD films on many substrate systems has been studied before; however, limited data is available on...
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Atomic Layer Deposition of Transition Metal Oxide Coatings for Oxygen Catalysis at the Air Electrode in Zn-Air Batteries
DownloadFall 2024
Energy storage is a critical step in fully adopting renewable energy, such as wind and solar, and eliminating carbon emissions from fossil fuel use. Electrochemical batteries are a versatile energy storage system and, as the ubiquitous battery of today, Li-ion batteries (LIBs) have begun to...
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Low Temperature Plasma Enhanced Atomic Layer Deposition of Conducting Zirconium Nitride: In-situ growth characterization, recipe development, and the sources of oxygen contamination in films
DownloadSpring 2015
Atomic layer deposition (ALD) enables uniform and conformal deposition of sub-nanometer thick films over large substrate area, hence is the most suitable technique for deposition of critical features in modern semiconductor fabrication. Compared to other transition metal nitrides, reported...
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Fall 2017
In order to keep the performance of solid oxide fuel cells (SOFCs) at intermediate operating temperature range (500℃ - 700℃), thin and fully dense yttria-stabilized zirconia (YSZ) electrolytes are desired to provide shorter oxygen ion transport distance and prevent fuel crossover and internal...