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Fall 2017
We present a platform for research into nanomaterial-enhanced gas sensing using magnetomotive MEMS resonators. A microfabrication process fl ow is developed and carried out to create metallized silicon MEMS resonators. In tandem, a test system based around a balanced electronic bridge is...
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Fall 2011
This work investigates the use of nanoimprint lithography for creating nanoscale resonator devices for applications in mass sensing. A bilayer resist consisting of PMMA 495/LOR 3A allowed the ideal imprint yield for resonators with widths ranging from 300 nm down to 120 nm. Resonators with...
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Fall 2016
Mass sensitive mechanical resonator based biosensors are a promising label free biological sensing platform due to the capability for high sensitivity, fast response, accurate and real time measurement, integration with traditional electronics and flexible readout techniques. With the advancement...