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Spring 2014
Energy harvesting is an important developing field in Microelectromechanical Systems (MEMS) research. In this thesis, a fixed-fixed folded spring-based harvester is presented as an alternative mechanical element for beam-based piezoelectric harvesters to reduce its natural frequency for low...
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An Investigation of Using n-Si Piezoresistive Behavior to Develop a Three-Dimensional Stress Sensing Rosette
DownloadFall 2013
This work involves the design, microfabrication, calibration, and testing of a new silicon-based piezoresistive rosette capable of extracting the three-dimensional (3D) stresses in the silicon upon deformation. A new 10-element piezoresistive rosette was devised to extract all stress components...
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Development of MEMS-based Piezoresistive Three Dimensional Stress/Strain Sensor with Temperature Compensation
DownloadSpring 2020
In this research, a developed n-type piezoresistive three dimensional (3D) stress sensor with full temperature compensation is presented. The proposed sensing rosette benefits from the stress insensitivity of the full-circular n-type piezoresistor, oriented over (111) silicon plane, to detect...
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The Further Development of Fringe Electric Field Theory for the Design of a Vertical Comb Drive to be used as a Force-Compensation Mechanism in an Interfacial Force Microscope
DownloadSpring 2015
The overall objective of the research presented here is to begin the design of a comb drive that is to be used as a force-compensation mechanism in an interfacial force microscope. More specifically, the objective of this research is to choose the type of comb drive that has the most potential...
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Understanding the Role of Surface Microgeometries on Wetting: Designing Robust Superhydrophobic Surfaces
DownloadSpring 2014
This thesis is concerned with effects of surface microgeometries on wetting, aiming at providing instructions for reproducing controllable wettability on artificial surfaces and designing robust superhydrophobic surfaces. First, the origin of edge effect is understood by a thermodynamic approach...