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Author / Creator / Contributor

1Westwood, Jocelyn N.

Supervisors

1Sit, Jeremy (Electrical and Computer Engineering)

Subject / Keyword

1Glancing angle deposition
1Gravimetric sensors
1Nanoelectromechanical systems
1Nanofabrication
1Nanotechnology

Year

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1Graduate and Postdoctoral Studies (GPS), Faculty of
1Graduate and Postdoctoral Studies (GPS), Faculty of/Theses and Dissertations

Languages

1English

Item type

1Thesis

Departments

1Department of Electrical and Computer Engineering

High Surface Area Nanoelectromechanical Systems via the Integration of Glancing Angle Deposition Thin Films
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Fall 2013

Westwood, Jocelyn N.

High surface area nanoelectromechanical systems (NEMS) are fabricated using glancing angle deposition (GLAD) thin films as the high surface area layer. The GLAD films are deposited on already-released NEMS cantilevers and doubly clamped beams (DCBs) with good uniformity. The resonance frequencies...

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High Surface Area Nanoelectromechanical Systems via the Integration of Glancing Angle Deposition Thin Films