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Fall 2020
This thesis describes the theory, fabrication, and characterization of on-chip, integrated Fabry-Perot microcavities embedded with thin silicon nitride membranes. The approach combines a previously developed process for fabricating self-assembled Si / SiO2 / Ta2O5 curved mirror cavities, with a...
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Fall 2020
This thesis describes the design, fabrication, morphological overview, optical characterization, and fluid infiltration of ‘open-access’, small mode-volume, and high quality-factor Fabry-Perot micro-cavities in the telecommunication range followed by the simulation of a-Si:H/SiO2-based Bragg...