Search
Skip to Search Results
Filter
Subject / Keyword
Languages
Author / Creator / Contributor
Year
Collections
Item type
-
Fall 2020
This thesis describes the theory, fabrication, and characterization of on-chip, integrated Fabry-Perot microcavities embedded with thin silicon nitride membranes. The approach combines a previously developed process for fabricating self-assembled Si / SiO2 / Ta2O5 curved mirror cavities, with a...
1 - 1 of 1