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Fundamentals of Film Growth by Glancing Angle Deposition for Inorganic and Inorganic/Liquid Crystal Hybrid Optical Systems
DownloadFall 2011
This thesis investigates two facets of thin film growth via glancing angle deposition. The first half of the work focuses on the fundamentals of film growth with a focus on uniformity and optical design. This portion of the thesis addresses important engineering questions that are relevant to...
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Effects of In-Situ Temperature Control on the Nanostructure of Glancing Angle Deposition Thin Films
DownloadFall 2013
Glancing angle deposition (GLAD) is a thin film deposition technique that utilizes oblique vapour incidence and substrate rotation to grow various nanocolumn structures. The growth of these structures is heavily influenced by the substrate temperature during deposition. Therefore, in-situ...
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High Surface Area Nanoelectromechanical Systems via the Integration of Glancing Angle Deposition Thin Films
DownloadFall 2013
High surface area nanoelectromechanical systems (NEMS) are fabricated using glancing angle deposition (GLAD) thin films as the high surface area layer. The GLAD films are deposited on already-released NEMS cantilevers and doubly clamped beams (DCBs) with good uniformity. The resonance frequencies...