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Spring 2013
Sensor technologies profoundly impact all aspects of our everyday lives. Advances have led to smaller devices, faster response times, reduced costs, higher specificity and sensitivity, and even new sensing technologies. Surface acoustic wave (SAW) technology, which has been around for many...
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Fundamentals of Film Growth by Glancing Angle Deposition for Inorganic and Inorganic/Liquid Crystal Hybrid Optical Systems
DownloadFall 2011
This thesis investigates two facets of thin film growth via glancing angle deposition. The first half of the work focuses on the fundamentals of film growth with a focus on uniformity and optical design. This portion of the thesis addresses important engineering questions that are relevant to...
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High Surface Area Nanoelectromechanical Systems via the Integration of Glancing Angle Deposition Thin Films
DownloadFall 2013
High surface area nanoelectromechanical systems (NEMS) are fabricated using glancing angle deposition (GLAD) thin films as the high surface area layer. The GLAD films are deposited on already-released NEMS cantilevers and doubly clamped beams (DCBs) with good uniformity. The resonance frequencies...