DNA-assisted Heterogeneous Integration of Micro- and Nanoelectronic Devices: Modeling, Control, and Rational Design of Selective Attachment

• Author / Creator

  Yesudas, Joshy P

• Heterogeneous integration is an electronic packaging approach that enables the fabrication and assembly of complete electronic subsystems from components fabricated with different substrates and processes. Current commercial techniques like robotic pick-and-place, fluidic self-assembly, and flip-chip bonding limit the size of parts to the 100 μm scale. Materials in the micro-and nanoscale exhibit novel characteristics (optical, magnetic, chemical, and electrical) and thereby have potential for a wide range of applications. This limitation can be surmounted with assembly techniques based on biomolecular approaches. This thesis describes a DNA-assisted self-assembly technique that utilizes the highly specific binding of complementary DNA strands to attach devices to specific locations on a host substrate. Commercialization of this technique will require that the process be modeled, controlled, and rationally designed. In the first part of the thesis, a modeling tool using molecular dynamics simulation and a three-dimensional molecular theory of solvation is validated and explored to study the behavior of various parameters that could influence this DNA hybridization technique. The second part of the thesis describes methods developed to fabricate the micro/nano-Si devices, attach the DNA strands to the patterned Si substrate, and characterize the DNA-assisted assembly of the devices on the substrate. The assembly of near-micron-sized Si devices is challenging, and the problems encountered during the experimental procedures are discussed. The theoretical and experimental work performed builds a basis for further research into biomolecular-assisted self-assembly and contributes to the medical, electronic, and sensing fields of research.

• Subjects / Keywords

  • 3D-RISM
  • Self-assembly
  • DNA
  • Heterogeneous integration

• Graduation date

  Spring 2018

• Type of Item

  Thesis

• Degree

  Doctor of Philosophy

• DOI

  https://doi.org/10.7939/R3K931N28

• License

  This thesis is made available by the University of Alberta Libraries with permission of the copyright owner solely for non-commercial purposes. This thesis, or any portion thereof, may not otherwise be copied or reproduced without the written consent of the copyright owner, except to the extent permitted by Canadian copyright law.