Nanostructured Inductors for Millimetre-Wave Applications

  • Author / Creator
    Seilis, Aaron G
  • Modern integrated and system-on-chip electronics require high-quality on-chip passive
    components. Existing inductor designs for microwave and millimetre-wave applications are
    typically prohibitively large and have low quality factors, requiring circuit designers to avoid
    integrating them or to use less desirable alternatives. This research studied vertical on-chip
    inductor structures through electromagnetic simulations and measurements on two materials.
    Simulations demonstrated that magnetic anisotropic materials produce useful inductances and
    quality factors at microwave frequencies. Thin magnetic films deposited using glancing angle
    deposition were fabricated as inductors and measured up to 70 GHz, producing inductances as
    high as 1 nH/um^2, which is significantly higher than other CMOS compatible technologies
    reported to date. The highest quality factor measured for the films was 3, with the measurements
    suggesting that the quality factor continues to increase at higher frequencies. Carbon nanotube
    inductors were also fabricated and measured, however, the contact resistance was found to be
    prohibitively high.

  • Subjects / Keywords
  • Graduation date
    Fall 2013
  • Type of Item
  • Degree
    Master of Science
  • DOI
  • License
    This thesis is made available by the University of Alberta Libraries with permission of the copyright owner solely for non-commercial purposes. This thesis, or any portion thereof, may not otherwise be copied or reproduced without the written consent of the copyright owner, except to the extent permitted by Canadian copyright law.