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High Surface Area Nanoelectromechanical Systems via the Integration of Glancing Angle Deposition Thin Films Open Access


Other title
nanoelectromechanical systems
gravimetric sensors
glancing angle deposition
Type of item
Degree grantor
University of Alberta
Author or creator
Westwood, Jocelyn N.
Supervisor and department
Sit, Jeremy (Electrical and Computer Engineering)
Examining committee member and department
Thundat, Thomas (Chemical Engineering)
Hiebert, Wayne (Physics)
Sit, Jeremy (Electrical and Computer Engineering)
Department of Electrical and Computer Engineering
Microsystems and Nanodevices
Date accepted
Graduation date
Master of Science
Degree level
High surface area nanoelectromechanical systems (NEMS) are fabricated using glancing angle deposition (GLAD) thin films as the high surface area layer. The GLAD films are deposited on already-released NEMS cantilevers and doubly clamped beams (DCBs) with good uniformity. The resonance frequencies of the coated devices are lower than uncoated NEMS due to mass loading. The resonance frequencies of the coated cantilevers can be predicted accurately. The resonance frequencies of the DCBs are difficult to predict because of compressive stress in the substrate from which the devices are fabricated. The quality factors of the coated devices are approximately one order of magnitude smaller than the uncoated devices due to a semi-continuous layer at the base of the GLAD film. The GLAD film introduces a compressive stress of 5.3-9.3 MPa. The quantification of the stress introduced by the GLAD indicates that these devices may also be useful as stress sensors.
Permission is hereby granted to the University of Alberta Libraries to reproduce single copies of this thesis and to lend or sell such copies for private, scholarly or scientific research purposes only. Where the thesis is converted to, or otherwise made available in digital form, the University of Alberta will advise potential users of the thesis of these terms. The author reserves all other publication and other rights in association with the copyright in the thesis and, except as herein before provided, neither the thesis nor any substantial portion thereof may be printed or otherwise reproduced in any material form whatsoever without the author's prior written permission.
Citation for previous publication
J.N. Westwood, V.T.K. Sauer, J.K. Kwan, W.K. Hiebert, J.C. Sit. “Fabrication of nanoelectromechanical systems via the integration of glancing angle deposition thin films.” Presentation, AVS International Symposium, Tampa, Florida, October 29 (2012).

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