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- 2Nanoelectromechanical systems
- 1Glancing angle deposition
- 1Gravimetric sensors
High Surface Area Nanoelectromechanical Systems via the Integration of Glancing Angle Deposition Thin FilmsDownload
High surface area nanoelectromechanical systems (NEMS) are fabricated using glancing angle deposition (GLAD) thin films as the high surface area layer. The GLAD films are deposited on already-released NEMS cantilevers and doubly clamped beams (DCBs) with good uniformity. The resonance frequencies...
Nanomechanical resonators offer a pathway towards highly sensitive and label-free detection of biomolecules by transducing the mass of bound analytes into resonant frequency shifts. Zeptogram level and even single cell detections have been successfully achieved by others. However, these...