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Permanent link (DOI): https://doi.org/10.7939/R32R3P74J

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Nanostructured Inductors for Millimetre-Wave Applications Open Access

Descriptions

Other title
Subject/Keyword
integrated inductors
RF
on-chip inductors
inductors
nanotechnology
radio frequency
Type of item
Thesis
Degree grantor
University of Alberta
Author or creator
Seilis, Aaron G
Supervisor and department
Mojgan Daneshmand, Electrical and Computer Engineering
Kambiz Moez, Electrical and Computer Engineering
Examining committee member and department
Michael Brett, Electrical and Computer Engineering
Neda Nazemifard, Chemical and Materials Engineering
Department
Department of Electrical and Computer Engineering
Specialization
Electromagnetics and Microwaves
Date accepted
2013-09-20T10:12:21Z
Graduation date
2013-11
Degree
Master of Science
Degree level
Master's
Abstract
Modern integrated and system-on-chip electronics require high-quality on-chip passive components. Existing inductor designs for microwave and millimetre-wave applications are typically prohibitively large and have low quality factors, requiring circuit designers to avoid integrating them or to use less desirable alternatives. This research studied vertical on-chip inductor structures through electromagnetic simulations and measurements on two materials. Simulations demonstrated that magnetic anisotropic materials produce useful inductances and quality factors at microwave frequencies. Thin magnetic films deposited using glancing angle deposition were fabricated as inductors and measured up to 70 GHz, producing inductances as high as 1 nH/um^2, which is significantly higher than other CMOS compatible technologies reported to date. The highest quality factor measured for the films was 3, with the measurements suggesting that the quality factor continues to increase at higher frequencies. Carbon nanotube inductors were also fabricated and measured, however, the contact resistance was found to be prohibitively high.
Language
English
DOI
doi:10.7939/R32R3P74J
Rights
Permission is hereby granted to the University of Alberta Libraries to reproduce single copies of this thesis and to lend or sell such copies for private, scholarly or scientific research purposes only. Where the thesis is converted to, or otherwise made available in digital form, the University of Alberta will advise potential users of the thesis of these terms. The author reserves all other publication and other rights in association with the copyright in the thesis and, except as herein before provided, neither the thesis nor any substantial portion thereof may be printed or otherwise reproduced in any material form whatsoever without the author's prior written permission.
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