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Theoretical and Experimental Investigation on the Use of Surface Acoustic Wave Sensors for Evaluating the Adhesion of SU-8 Thin FilmsDownload
This research investigates the use of a SU-8/AlN/Si SAW sensor for evaluating the adhesion of SU-8 thin films. A theoretical model is developed to plot the wave dispersion profile for the SU-8/AlN/Si configuration. A spring interface model is utilized to represent the SU-8/AlN interface using a...