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Development of MEMS-based Piezoresistive Three Dimensional Stress/Strain Sensor with Temperature Compensation
DownloadSpring 2020
In this research, a developed n-type piezoresistive three dimensional (3D) stress sensor with full temperature compensation is presented. The proposed sensing rosette benefits from the stress insensitivity of the full-circular n-type piezoresistor, oriented over (111) silicon plane, to detect...
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Utilization of Semiconductors Piezoresistive Properties in Mechanical Strain Measurements under Varying Temperature Conditions for Structural Health Monitoring Applications
DownloadSpring 2013
Strain gauges have been powerful tools in experimental stress analysis. This importance is expected to continue, even though other means of strain measurement are continually introduced to the market. The strain gauge is a simple device that can be easily installed to measure mechanical strain....