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- 1Continuous film
- 1E-beam lithography
- 1Laser induced forward transfer
- 1Lateral resolution
- 1Photolithography
- 1Pre-patterned disk
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Fall 2009
In this thesis the lateral resolution limits of the Laser Induced Forward Transfer (LIFT) technique are being investigated. LIFT is a laser direct write process with micron and below resolution and is suitable for modifying, repairing and prototyping micro-devices. Single laser pulses with...
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