Search
Skip to Search Results
Filter
Subject / Keyword
- 1 N-type Silicon
- 1 Stress Sensor
- 13D Stress Measurement
- 1Micro electromechanical Systems
- 1Microfabrication
- 1Neural Networks
Author / Creator / Contributor
Year
Collections
Languages
Item type
Departments
-
Development of MEMS-based Piezoresistive Three Dimensional Stress/Strain Sensor with Temperature Compensation
DownloadSpring 2020
In this research, a developed n-type piezoresistive three dimensional (3D) stress sensor with full temperature compensation is presented. The proposed sensing rosette benefits from the stress insensitivity of the full-circular n-type piezoresistor, oriented over (111) silicon plane, to detect...
1 - 1 of 1