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- 1Anchor Modeling
- 1Dense Gratings
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- 1Electron Beam Lithography
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Fall 2013
Electron beam lithography (EBL) is the leading technology for versatile two dimensional patterning at the deep (10-100 nm) nanoscale. In addition to its reputation as an enabling technology for next generation advances in industry, its ease of use, accuracy, and cost has made it the technology of...
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