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Skip to Search Results- 3Electron Beam Lithography
- 2Nanofabrication
- 1Anchor Modeling
- 1Biosensing
- 1Dense Gratings
- 1Developer Free
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Spring 2012
In order to achieve the best results possible by electron beam lithography (EBL), many aspects of the different stages of EBL have to be carefully optimized. In the exposure stage, dose, energy, aperture size, step size and working distance have to be carefully set. In the development stage, an...
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Fabrication and testing of surface-enhanced Raman spectroscopy substrates for the detection of biomolecules
DownloadSpring 2014
Biosensing involves the detection of analytes using biological elements as receptor agents for the specific binding of molecules to a surface. Surface-enhanced Raman spectroscopy (SERS), a surface-sensitive vibrational spectroscopy technique used to amplify Raman signals, provides unique...
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Fall 2013
Electron beam lithography (EBL) is the leading technology for versatile two dimensional patterning at the deep (10-100 nm) nanoscale. In addition to its reputation as an enabling technology for next generation advances in industry, its ease of use, accuracy, and cost has made it the technology of...