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Author: Luo, Jia Subject: Sputtering

  • Thin Film pH Measuring Device

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    Fall 2011

    Luo, Jia

    This thesis presents research on the selection and development of thin film deposition of materials and initial data on the integration of a pH measuring device suitable for evaluation. This device used two particular tantalum compounds deposited by dc magnetron reactive sputtering as functional...

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