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Effects of In-Situ Temperature Control on the Nanostructure of Glancing Angle Deposition Thin Films
DownloadFall 2013
Glancing angle deposition (GLAD) is a thin film deposition technique that utilizes oblique vapour incidence and substrate rotation to grow various nanocolumn structures. The growth of these structures is heavily influenced by the substrate temperature during deposition. Therefore, in-situ...
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