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Fall 2017
We present a platform for research into nanomaterial-enhanced gas sensing using magnetomotive MEMS resonators. A microfabrication process fl ow is developed and carried out to create metallized silicon MEMS resonators. In tandem, a test system based around a balanced electronic bridge is...
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Fall 2024
Reducing device size in sensing technology allows for greater measurable responses, and easier integration into smaller testing environments. This work details the fabrication of high sensitivity magnetomotive gravimetric MEMS cantilevers for eventual use in gas detection. The devices are doubly...