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Development of MEMS-based Piezoresistive Three Dimensional Stress/Strain Sensor with Temperature Compensation
DownloadSpring 2020
In this research, a developed n-type piezoresistive three dimensional (3D) stress sensor with full temperature compensation is presented. The proposed sensing rosette benefits from the stress insensitivity of the full-circular n-type piezoresistor, oriented over (111) silicon plane, to detect...
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