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- 12Nanomaterials
- 8Lithography
- 6Block copolymers
- 5Glancing angle deposition
- 5Self-assembly
- 2Wu, Nathanael Lap-Yan
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- 1Achal, Roshan
- 1Adeyenuwo, Adegboyega P.
- 1Bandara, Nandika P.
- 1Bhuiyan, Abuhanif
- 36Graduate and Postdoctoral Studies (GPS), Faculty of
- 36Graduate and Postdoctoral Studies (GPS), Faculty of /Theses and Dissertations
- 1Digital Humanities Program
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- 1Chemical and Materials Engineering, Department of
- 1Chemical and Materials Engineering, Department of/Research Articles and Materials (Chemical and Materials Engineering)
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Advanced methods in Glancing Angle Deposition to control thin film morphology, microstructure and texture
DownloadSpring 2014
Structuring of material on the nanoscale is enabling new functional materials and improving existing technologies. Glancing angle deposition (GLAD) is a physical vapor deposition technique that enables thin film fabrication with engineered columnar structures on the (10 to 100) nm scales. In this...
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Spring 2010
Thin films are produced from layers of materials ranging from nanometres to micrometres in height. They are increasingly common and are being used in integrated circuit design, optical coatings, protective coatings, and environmental sensing. Thin films can be fabricated using a variety of...
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Fall 2017
We present a platform for research into nanomaterial-enhanced gas sensing using magnetomotive MEMS resonators. A microfabrication process fl ow is developed and carried out to create metallized silicon MEMS resonators. In tandem, a test system based around a balanced electronic bridge is...