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- 1Adhesion
- 1Frequency Optimization
- 1MEMS Characterization
- 1Mechanical Engineering
- 1Microfabrication
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Spring 2014
Energy harvesting is an important developing field in Microelectromechanical Systems (MEMS) research. In this thesis, a fixed-fixed folded spring-based harvester is presented as an alternative mechanical element for beam-based piezoelectric harvesters to reduce its natural frequency for low...
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Development of a MEMS 3D Stress Sensor Using Strain Engineering for Out of Plane Stress Applications
DownloadSpring 2020
This work aims to enhance the performance of a MEMS-based 3D piezoresistive sensor, which has the capability of extracting the six temperature-compensated stress components. That sensor is made of an n-type piezoresistive element that has low pressure/out-of-plane piezoresistive (PR) coefficient,...
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Theoretical and Experimental Investigation on the Use of Surface Acoustic Wave Sensors for Evaluating the Adhesion of SU-8 Thin Films
DownloadFall 2015
This research investigates the use of a SU-8/AlN/Si SAW sensor for evaluating the adhesion of SU-8 thin films. A theoretical model is developed to plot the wave dispersion profile for the SU-8/AlN/Si configuration. A spring interface model is utilized to represent the SU-8/AlN interface using a...