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Author / Creator / Contributor
1
Chini, Seyed Farshid
Subject / Keyword
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Microlithography.
1
Nanoelectromechanical systems.
1
Nanotechnology.
1
Photolithography.
Item type
1
Thesis
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Graduate and Postdoctoral Studies (GPS), Faculty of
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Graduate and Postdoctoral Studies (GPS), Faculty of /Theses and Dissertations
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Languages
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English
Departments
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Department of Mechanical Engineering
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Author: Chini, Seyed Farshid
Subject: Microlithography.
Item type: Thesis
Collections: Graduate and Postdoctoral Studies (GPS), Faculty of /Theses and Dissertations
Studying the collapse of photoresist patterns during photolithography process
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2008
Chini, Seyed Farshid
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