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- 13D Stress Measurement
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Development of MEMS-based Piezoresistive Three Dimensional Stress/Strain Sensor with Temperature Compensation
DownloadSpring 2020
In this research, a developed n-type piezoresistive three dimensional (3D) stress sensor with full temperature compensation is presented. The proposed sensing rosette benefits from the stress insensitivity of the full-circular n-type piezoresistor, oriented over (111) silicon plane, to detect...
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2017-01-01
Carvalho, Wildemar S. P., Wei, Menglian, Ikpo, Nduka, Gao, Yongfeng, Serpe, Michael J.
Reports in the literature on the development of new chemical sensing technologies have been growing steadily in number for years. For example, a Web of Science topic search using the term “Chemical Sensing” revealed that over 8 000 papers were published in 2015–2017, with over 40 000 citations to...