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Wear-corrosion synergy of tungsten in K₃[Fe(CN)₆] slurry for chemical-mechanical planarization

  • Author / Creator
    Akonko, Saheed Bamidele
  • Subjects / Keywords
  • Graduation date
    2005
  • Type of Item
    Thesis
  • Degree
    Master of Science in Materials Engineering
  • DOI
    https://doi.org/10.7939/r3-p66q-gs56
  • License
    This thesis is made available by the University of Alberta Libraries with permission of the copyright owner solely for the purpose of private, scholarly or scientific research. This thesis, or any portion thereof, may not otherwise be copied or reproduced without the written consent of the copyright owner, except to the extent permitted by Canadian copyright law.