Usage
  • 35 views
  • 93 downloads

Microstructure-based Direct Digital Capacitive Pressure Sensor

  • Author / Creator
    Dick, Carson R.
  • Pressure sensors are important in many applications, from medical hyperbaric oxygen chambers to
    precision pressure monitoring in vacuum setups of semiconductor manufacturing. With their simple
    design and high precision, capacitive pressure sensors are one of the best designs of pressure sensors. In
    this thesis, we proposed a new class of microstructure-based direct digital capacitive pressure sensor,
    including the microstructured pressure-to-capacitance transducer and its capacitance-to-frequency
    digital conversion circuitry. The microstructured transducer design provides ease of fabrication and longterm durability. The novel sensor circuit using digital phase-locked-loop (PLL) enables highly sensitive
    detection of capacitance. For proof of concept, we fabricated the microstructured transducer and
    constructed the digital PLL using discrete parts. The experimental results and analysis show the viability
    of implementing such sensors in the future.

  • Subjects / Keywords
  • Graduation date
    Fall 2020
  • Type of Item
    Thesis
  • Degree
    Master of Science
  • DOI
    https://doi.org/10.7939/r3-fpmt-3058
  • License
    Permission is hereby granted to the University of Alberta Libraries to reproduce single copies of this thesis and to lend or sell such copies for private, scholarly or scientific research purposes only. Where the thesis is converted to, or otherwise made available in digital form, the University of Alberta will advise potential users of the thesis of these terms. The author reserves all other publication and other rights in association with the copyright in the thesis and, except as herein before provided, neither the thesis nor any substantial portion thereof may be printed or otherwise reproduced in any material form whatsoever without the author's prior written permission.