Stress-free ultra-hard NEMS cantilevers fabricated from atomically-smooth Ni-Mo nanocomposite thin films

• NEMS cantilevers from Ni-Mo thin films

• Author / Creator

  Mohammadi, Reza, 1973-

• Subjects / Keywords

  • Thin films.
  • Nanocomposites (Materials)
  • Nanoelectromechanical systems.

• Graduation date

  2008

• Type of Item

  Thesis

• Degree

  Doctor of Philosophy

• DOI

  https://doi.org/10.7939/r3-8mv0-6377

• License

  This thesis is made available by the University of Alberta Libraries with permission of the copyright owner solely for the purpose of private, scholarly or scientific research. This thesis, or any portion thereof, may not otherwise be copied or reproduced without the written consent of the copyright owner, except to the extent permitted by Canadian copyright law.