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A study of the colloidal stability of mixed abrasive slurries of silica and ceria nanoparticles for chemical mechanical polishing Open Access


Other title
chemical mechanical polishing
colloidal stability
mixed abrasive slurries
zeta potential
Type of item
Degree grantor
University of Alberta
Author or creator
Lin, Fangjian
Supervisor and department
Cadien, Ken (Chemical and Materials Engineering)
Xu, Zhenghe (Chemical and Materials Engineering)
Examining committee member and department
Liu, Qingxia (Chemical and Materials Engineering)
Xu, Zhenghe (Chemical and Materials Engineering)
Cadien, Ken (Chemical and Materials Engineering)
Sit, Jeremy (Electrical and Computer Engineering)
Department of Chemical and Materials Engineering

Date accepted
Graduation date
Master of Science
Degree level
Slurry stability is an important factor in Chemical Mechanical Polishing (CMP) efficiency. However, few studies have been done in this respect. In settling tests at pH 4, adding various amounts of ceria to colloidal silica slurries was shown to change the stability of the resulted mixed abrasive slurries (5 wt% of silica). Within a range of ceria-to-silica weight ratios, known as the transition range, the mixed abrasive slurries were observed to be unstable. A mathematical estimation based on zero net surface charge was proposed. The modification of particle surface charges through the attachment of positively charged ceria particles to negatively charged silica particles made the mixed slurries unstable. TEM images confirmed such attachments at pH 4. Compared to the slurries containing a single kind of particle, such mixed abrasive slurries were more effective in the CMP of PECVD oxide under the same conditions.
License granted by Fangjian Lin ( on 2011-08-25T17:07:16Z (GMT): Permission is hereby granted to the University of Alberta Libraries to reproduce single copies of this thesis and to lend or sell such copies for private, scholarly or scientific research purposes only. Where the thesis is converted to, or otherwise made available in digital form, the University of Alberta will advise potential users of the thesis of the above terms. The author reserves all other publication and other rights in association with the copyright in the thesis, and except as herein provided, neither the thesis nor any substantial portion thereof may be printed or otherwise reproduced in any material form whatsoever without the author's prior written permission.
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