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Permanent link (DOI): https://doi.org/10.7939/R3559J

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Improved Gecko Inspired Dry Adhesives Applied to the Packaging of MEMS Open Access

Descriptions

Other title
Subject/Keyword
Packaging
Gel-Pak
Antistatic
Adhesion testing
Bioinspired
Adhesion
Dry Adhesives
Polymer
Gecko
Pick and Place
Dry adhesion
Micromolding
Micralyne
MEMS
Gecko Inspired Adhesion
Polyurethane
Type of item
Thesis
Degree grantor
University of Alberta
Author or creator
Ferguson, Brendan J
Supervisor and department
Sameoto, Daniel (Mechanical Engineering)
Examining committee member and department
Evoy, Stephan (Electrical & Computer Engineering)
Moussa, Walied (Mechanical Engineering)
Long, Rong (Mechanical Engineering)
Department
Department of Mechanical Engineering
Specialization

Date accepted
2013-04-02T15:52:32Z
Graduation date
2013-06
Degree
Master of Science
Degree level
Master's
Abstract
An alternative method of manipulating fragile MEMS devices during fabrication has been developed. A specialized manual or robotic end effector utilizing a gecko inspired adhesive can replace the slow and costly manual tweezers used by the MEMS foundry Micralyne Inc. Improving the adhesive fabrication techniques greatly increased adhesion strength, which was tested with a custom programmed apparatus. An antistatic, nanoparticle-polymer composite was developed for the adhesive material to prevent static discharge. The improved adhesive was then used with a specially designed end effector that contacts only the bonding pads or perimeter of the MEMS device, preventing damage to sensitive central structures. Using special techniques that only rely on shearing motions, the adhesive is engaged and disengaged to move the MEMS device between common carriers such as tacky Gel-Paks. This is the first part of a project to implement such adhesives into commercial manufacturing of MEMS or other sensitive electronic devices.
Language
English
DOI
doi:10.7939/R3559J
Rights
Permission is hereby granted to the University of Alberta Libraries to reproduce single copies of this thesis and to lend or sell such copies for private, scholarly or scientific research purposes only. Where the thesis is converted to, or otherwise made available in digital form, the University of Alberta will advise potential users of the thesis of these terms. The author reserves all other publication and other rights in association with the copyright in the thesis and, except as herein before provided, neither the thesis nor any substantial portion thereof may be printed or otherwise reproduced in any material form whatsoever without the author's prior written permission.
Citation for previous publication
Gel-Pak(R). 2006; Available at:  www.gelpak.com
. Accessed 9/14, 2012.Autumn K, et al. 2006 Frictional adhesion: a new angle on gecko attachment J Exp Biol 209 3569-3579.Geim AK, et al. 2003 Microfabricated adhesive mimicking gecko foot-hair Nat Mater 2 461-463.Nabesawa H, et al. 2008 Polymer surface morphology control by reactive ion etching for microfluidic devices Sensor Actuat B-Chem 132 637-643.Cheung E, Sitti M. 2009 Adhesion of Biologically Inspired Polymer Microfibers on Soft Surfaces Langmuir 25 6613-6616.Murphy MP, et al. 2009 Enhanced Adhesion by Gecko-Inspired Hierarchical Fibrillar Adhesives ACS Appl Mater Interfaces 1 849-855.Aksak B, et al. 2007 Adhesion of Biologically Inspired Vertical and Angled Polymer Microfiber Arrays Langmuir 23 3322-3332.Cheng H, et al. 2012 An analytical model for shear-enhanced adhesiveless transfer printing Mech Res Commun 43 46-49.

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