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Permanent link (DOI): https://doi.org/10.7939/R3B983

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Thin Film pH Measuring Device Open Access

Descriptions

Other title
Subject/Keyword
sputtering
TaN
Ta2O5
XPS
ion conductor
Type of item
Thesis
Degree grantor
University of Alberta
Author or creator
Luo, Jia
Supervisor and department
Cadien, Ken (Chemicals and Materials Engineering)
Examining committee member and department
Barlage, Douglas (Electrical and Computer Engineering)
Nychka, John (Chemical and Materials Engineering)
Department
Department of Chemical and Materials Engineering
Specialization

Date accepted
2011-06-17T16:25:56Z
Graduation date
2011-11
Degree
Master of Science
Degree level
Master's
Abstract
This thesis presents research on the selection and development of thin film deposition of materials and initial data on the integration of a pH measuring device suitable for evaluation. This device used two particular tantalum compounds deposited by dc magnetron reactive sputtering as functional layers. Key parameters to film quality, such as resistivity, optical constants, composition, and pH response will be discussed in detail. Results indicated that nitrogen gas flow both controls the resistivity of sputtered tantalum nitride and suppressed the incorporation of oxygen. Variable Angle Spectroscopic Ellipsometer transmission scan on tantalum oxide with various oxygen pressure indicated insulating oxide forms only when the target enters oxide mode at 10+ sccm of oxygen flow. X-ray Photo-electron Spectroscopy surveys on tantalum oxide films showed that stoichiometric tantalum pentoxide was deposited. Preliminary result on pH response of the devices indicated the resistance increased with increasing pH.
Language
English
DOI
doi:10.7939/R3B983
Rights
Permission is hereby granted to the University of Alberta Libraries to reproduce single copies of this thesis and to lend or sell such copies for private, scholarly or scientific research purposes only. Where the thesis is converted to, or otherwise made available in digital form, the University of Alberta will advise potential users of the thesis of these terms. The author reserves all other publication and other rights in association with the copyright in the thesis and, except as herein before provided, neither the thesis nor any substantial portion thereof may be printed or otherwise reproduced in any material form whatsoever without the author's prior written permission.
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