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Precision tuning of silicon photonic devices using multi-shot femtosecond laser irradiation and characterization of incubation effect in multi-shot femtosecond laser irradiated silicon
DownloadFall 2024
Silicon photonics has emerged as a promising platform for advanced on-chip integrated optical devices and advanced microelectronic circuits during the last decades. Due to its extreme sensitivity to fabrication precision and tolerance, a post-fabrication tuning method is typically required to...
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