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Metallic thin films for NEMS/MEMS: from fundamental behaviour to microstructural design and fabrication
DownloadFall 2011
The main focus of this thesis is the study of thin metal films in microelectromechanical/nanoelectromechanical systems (MEMS/NEMS), ranging from application to fundamental behaviour. The use of metallic structural components is desirable since they are electrically conductive, optically reflective...
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