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Integrated Hollow-Core Microcavity Arrays - Building Blocks for Optical Sensing and Quantum Information
DownloadFall 2017
This thesis describes an experimental and theoretical study of a novel class of air-core microcavities on chips, monolithically fabricated by the controlled formation of delamination buckles within a-Si/SiO2-based multilayer thin film stacks. First, arrays of dome-shaped microcavities were...
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